Unsafe Waste Management in the Semiconductor Industry

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2. What is a Hazardous Waste?. Perilous squanders are produced from the numerous sorts of semiconductor assembling processes.Hazardous squanders are chemicals that can never again be utilized, reused, or exchanged and should be disposed.Regulated under the Federal Resource Conservation and Recovery Act (RCRA) and State of California regulations (Title 22)Hazardous squanders have one or a greater amount of the take after

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´╗┐Perilous Waste Management in the Semiconductor Industry Ron Scholtz-CHMM, REA Analog Devices, Inc. October 7, 2003

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What is a Hazardous Waste? Unsafe squanders are created from the many sorts of semiconductor assembling forms. Dangerous squanders are chemicals that can never again be utilized, reused, or exchanged and should be arranged. Controlled under the Federal Resource Conservation and Recovery Act (RCRA) and also State of California directions (Title 22) Hazardous squanders have at least one of the accompanying qualities: Corrosive (pH <2 or >12.5) Ignitable (Flashpoint < 140F) Reactive Toxic

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Waste Management Strategies Minimize the era of squanders as much as attainable. Limit the danger of the waste produced as much as possible. Deal with the waste nearby where conceivable (treatment). Select the off-site transfer innovation which decreases the long haul liabilities however much as could reasonably be expected. Reuse Treatment Incineration Landfill Ensure that the squanders are taken care of and arranged as per all laws and controls. Guarantee that off-site disposers are dealing with squanders legitimately and they display no superfluous liabilities.

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Corrosive Wastes Typical destructive squanders include: Sulfuric Acid, Hydrofluoric Acid, Phosphoric Acid, Nitric Acid, Ammonium Hydroxide, Hydrogen Peroxide, Tetramethyl Ammonium Hydroxide Acids are utilized for carving, stripping, and cleaning wafers Tetramethyl Ammonium Hydroxide is a positive photoresist designer Corrosive squanders are dealt with in on location in basic corrosive balance frameworks Flow through framework Uses Caustic and Acid to conform pH to in the vicinity of 6 and 10 Discharges to neighborhood POTW Hydrofluoric Acid squanders are dealt with in on location fluoride precipitation frameworks Batch treatment handle Generate calcium fluoride channel cake-landfill Treated water goes to POTW

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Ignitable Wastes Photoresists (PGMEA), Isopropyl Alcohol, Strippers, Acetone, n-Butyl Acetate, Xylene (old) Strippers are an exclusive mixes of natural acids or bases Collected in drums or tanks Sent off-site for reuse, fuel mixing, or burning

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Contaminated Solids Acid debased gloves and wipes-created from utilized PPE, tidy up of little dribbles Solvent tainted gloves and wipes-produced from utilized PPE, wipe cleaning of parts, spill tidy up Arsenic polluted gloves and wipes-created from particle embed support exercises Lead sullied gloves and wipes-produced from lead welding housekeeping exercises Many waste minimization openings human component Pelletize and use as a fuel source Others must be burned

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"Unique" Wastes Not RCRA managed, yet should be legitimately arranged. Lapsed Batteries-metals Fluorescent Light Bulbs-mercury Lighting Ballasts-PCB's, oil, metals Reject item lead Computer screens lead Empty vaporized jars Lead squares Asbestos development materials Cafeteria oil Empty synthetic jugs

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Generator Requirements (40 CFR) EPA ID number Waste portrayal and investigation Proper stockpiling regulation, compartments, passageways Security of capacity territories Employee preparing Weekly assessments Emergency reaction Proper naming HW name, DOT risk mark, amassing begin date Uniform perilous waste show DOT shipping necessities apply (49 CFR) Approved transporters Approved TSDF offices for off-site transfer Fees, reports

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"Layered Permitting" California permits sure on location treatment of dangerous squanders under the "layered allowing" framework instead of requiring a full TSDF allow. Corrosive balance, HF precipitation, and container wash apply. Restrictively Exempt, Conditionally Authorized, and Permit by Rule levels. Starting notice and allow endorsement Annual answer to lead organization DTSC or CUPA Tank and regulation confirmations Closure cost gauge Financial affirmation accreditations

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Off-Site Disposal Facilities It is essential that the off-site transfer office has the capacity, duty, budgetary assets, and abnormal state of consistence to deal with an organization's squanders. Continuously review another office before sending any squanders to them. Occasionally review existing offices changes in possession Use a review checksheet There are administrations accessible that give review reports Comes down to a gut-check level of solace Sometimes TSDF offices are not promptly accessible in neighborhoods have restricted capacities Don't spread out the obligation excessively. Attempt to breaking point to just a couple of good offices with various abilities Superfund, CERCLA, tidy up costs, obligation great watchwords while examining choices with administration

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Source Reduction SB-14 Hazardous Waste Source Reduction and Management Review Act of 1989 Requires a "Source Reduction Evaluation Review and Plan" at regular intervals. Concentrates on squanders that speak to at least 5% of aggregate. "Watery squanders" and "showed squanders" Requires an "Unsafe Waste Management Performance Report" covering the past 4 years. Must be made accessible to the general population on demand. The State concentrates on a few industry parts every year. Semiconductor industry is at present being checked on by the State DTSC. A workshop (together with SESHA) and official report will be produced by the State exhibiting examples of overcoming adversity inside the business.

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Source Reduction Approaches include: Input Changes - crude material changes Operational Improvements - misfortune avoidance, squander isolation, support Production Process Changes - changes in temperature, weight, mechanization, hardware changes Product Reformulations - changes in plan, creation, or particular of definite item Administrative Steps - stock control, worker programs Other

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Source Reduction Evaluation criteria incorporates: Amount of waste decreased Technical plausibility Economic attainability Effects on item quality Employee wellbeing and security Regulatory consistence Releases and releases to other media

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Summary Minimize the era of squanders as much as practical. Limit the peril of the waste created as much as plausible. Deal with the waste nearby where conceivable (treatment). Select the off-site transfer innovation which lessens the long haul liabilities however much as could reasonably be expected Ensure that the squanders are dealt with and arranged as per all laws and controls. Guarantee that off-site disposers are taking care of squanders legitimately and they exhibit no pointless liabilities.

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