Cleanrooms

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Presentation to ESTECH 2005 Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory

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Investigating the Performance of a Minienvironment System Tengfang (Tim) Xu, Ph.D., PE Environmental Energy Technologies Division Lawrence Berkeley National Laboratory May 3, 2005

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Investigating the Performance of a Minienvironment System Introduction Scope and Objectives Case Study Methods Results Conclusions and Recommendations

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Introduction Minienvironment A minienvironment is a confined situation made by a walled in area to segregate an item or process from the encompassing environment Separative Devices

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Why Minienvironment? Minienvironment - Separative Devices Gaining wide selection in different businesses Knowledge about vitality proficiency Emerging advancements and techniques to enhance effectiveness

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Cleanroom Electric Power Cleanroom Measured Power

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Cleanroom Contamination Control

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Efficient Air Systems Reduce beginning expenses upgraded estimating Reduce utility expenses while profiting profitability Other non-vitality benefits Energy productive outline can be considered as a procedure in the business to accomplish cost reserve funds and enhance main concern

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ISO Standards from IEST The Institute of Environmental Sciences and Technology (IEST) ISO 14644 (1 through 8): Cleanrooms and Controlled Environments ISO 14698 (1 through 3): Bio-pollution

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Minienvironment inside a Ballroom (Cleanroom)

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Background Energy data on minienvironments is basically non-existent Understand vitality effectiveness openings in minienvironments Key measurements: W/cfm

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Objectives Develop a comprehension of the key parameters adding to vitality execution of a minienvironment Quantify vitality execution of the minienvironment air framework and distinguish open doors for enhancing its vitality execution.

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Approaches Literature surveys Develop a contextual investigation on minienvironment framework execution Collaborate with industry pioneers and Sematech in research activities

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Case Study Method Minienvironment 4 FFUs of 1'x2' Dimensions (2'x4'x 7'7'') Electric Power True RMS vitality analyzer (±3%) Airflow and Pressure electronic miniaturized scale - m anometer (±3% of perusing in addition to ±7 fpm) Pitot tube (±2% of perusing + 0.25Pa)

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Case Study Results Total fan control versus Wind current rate

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Case Study Results Power figure versus Wind current rate

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Case Study Results EPI versus Wind stream rate

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Case Study Results Static weight versus Wind current rate

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Case Study Results Pressure contrast versus wind stream rate

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Conclusions Measure up with Cleanrooms: EPI

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Recommendations - i Improve vitality execution of minienvironment frameworks Fan-channel Unit Airflow way

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FFU: Wide Range of Efficiencies

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FFU: Performance

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Recommendations – ii Understand vitality ramifications of minienvironment versus cleanroom through exhibitions Electric power utilization Size of minienvironment Cleanliness necessities

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Recommendations - iii Develop show for approach and devices to handle and execute vitality productivity all through arranging, development, establishment, plan, charging, O&M, re-appointing, reuse of minienvironment and joining with process and cleanroom office

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Recommendations - iv Develop and recognize methodologies in vitality proficiency for compelling ecological control

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Interaction with IEST Interact with IEST to perhaps receive vitality effectiveness in prescribed practice (RP) rules IEST WGs

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Questions TTXU@LBL.GOV Lawrence Berkeley National Laboratory

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