Air bubble development and disintegration in apportioning nanoimprint lithography

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. Centrality. Nanoimprint lithography is a demonstrated procedure with high throughput for designing nano-structuresDispensing NIL are minimal effort and simple to execute methods that are alluring for mass productionMore examination is required keeping in mind the end goal to enhance its execution and decide its actual potential for large scale manufacturing ..

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Slide 1

Air bubble development and disintegration in apportioning nanoimprint lithography Xiaogan Liang, Hua Tan, Zengli Fu, and Stephen Y Chou Nanotechnology, 17 Jan 2007 William Casper-Ortiz Mechanical Engineering Dept. UC Berkeley

Slide 2

Significance Nanoimprint lithography is a demonstrated system with high throughput for designing nano-structures Dispensing NIL are minimal effort and simple to actualize procedures that are appealing for large scale manufacturing More research is required so as to enhance its execution and decide its actual potential for large scale manufacturing .

Slide 3

But… how great is it expelling the air bubbles ? By what means can bubble expulsion be improved ? Presentation Dispensing based NIL Room temperature Low engraving weight Requires no vacuum

Slide 4

Experimental Study Experimental Nanonex NX-3000 Apparatus  Step-and-rehash NIL instrument Resist  NXR-2051( µ=4mPa s) Mold  1in 2 engrave territory Inject spout  100-800pl Vary shape elements and weight Collect information on air pocket distance across, oppose zone and form substrate hole measure

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Size ordinarily on an indistinguishable request from example measurement ! Bubbles < 100 µm effectively consumed by the oppose > 300 µm are still present after 1hr Experimental Study Pinning Spreading edge is stuck by a basic component

Slide 6

Initial size relies on upon bead detachment Broad size conveyance 100 µm-mm Experimental Study Encircling Multiple beads decrease engrave compel and increment speed Air is caught as beads union

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Navier Stokes condition Diffusion equation Henry's Law for BC's Continuity condition Theoretical Study Theoretical Model Molecular dissemination hypothesis Hydrodynamics

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Effects of introductory air bubble estimate Effects of engraving weight P B n R disintegration Strong reliance > 100 µm  >10s Three locales Boyle's Law overwhelms Constant weight Sizable Laplace weight Theoretical Study

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Effects of oppose consistency Effects of air dissolvability Exponential rot 1% contrast 4-20mPa.s Key parameter No essential impact Viscous anxiety is 2 OM littler than P B Theoretical Study

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Effects of oppose leftover layer thickness Once the form comes into nearness to the substrate, P n commitment to P B is lessened. Disintegration time increments Theoretical Study

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Conclusions Dissolution time can be essentially diminished by: diminishing beginning air pocket estimate , applying higher engraving weights , and additionally expanding the oppose's Henry law steady. Oppose consistency does not assume an imperative part Near zero leftover layer thickness moderates bubble shrinkage Key conclusion: Air retention time may be to yearn for the apportioning NIL at or close air to have the essential throughput for mass assembling

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